3d Micromac Micropro™ Energy Equipment & Supplies

1 equipment items found

3D-Micromac microPRO™ - Model RTP - Selective Laser Annealing System for Semiconductor Applications

Manufactured by:3D-Micromac AG based inChemnitz, GERMANY

The microPRO™ RTP, a new laser annealing system designed to enable several key process steps in semiconductor, power device and MEMS manufacturing, combines a state-of-the-art laser optic module with 3D-Micromac’s modular semiconductor wafer manufacturing platform. It provides selective annealing with high repeatability and throughput in a versatile system. The microPRO™ RTP ...

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